碳化硅生长和衬底建模以及基于MOVPE技术的氮化镓生长模拟 Modeling of SiC crystal growth and epitaxy and simulation of GaN metal Organic Vapor DepositionAndrey SMIRNOV俄罗斯STR Group, Inc.资深研发工程师 Andrey SMIRNOVSenior Research Engineer of STR Group, Inc., Russia