等离子刻蚀技术在第三代化合物半导体领域的应用Application of Plasma Etching Technology in the Third-generation Compound Semiconductor Field谢秋实北京北方华创微电子装备有限公司 第一刻蚀事业部副总经理XIE QiushiDeputy General Manager of NAURA Technology Group Co., Ltd.