化合物半导体工艺设备解决方案 Equipment and Processes Solutions in Compound Semiconductor王显刚北京北方华创微电子装备有限公司LED及化合物半导体行业发展部总经理WANGXiangangGeneral Manager ofLED and Compound Semiconductor Developmentdepartment, Beijing NAURA Microelectronics Equipment Co.,ltd.