大连理工大学副教授张赫之：利用高Al组分β-(AlGa)2O3缓冲层在蓝宝石衬底上优化生长高质量β-Ga2O3厚膜

利用高Al组分-(AlGa)2O3缓冲层在蓝宝石衬底上优化生长高质量-Ga2O3厚膜Growth of high quality - Ga2O3 thick film on sapphire by using high Al content - (AlGa)2O3 buffer layer张赫之大连理工大学副教授ZHANG HezhiAssociate professor of Dalian University of Technology