SiC功率器件制造装备技术及发展趋势Technology and development trends of SiC power devices manufacturing equipment巩小亮中国电子科技集团公司第四十八研究所、半导体装备研究部主任Xiaoliang GONGDirector of Semiconductor equipment research department, The 48th Research Institute of China Electronics Technology Group Corporation

GaN/SiC功率器件在航天电源的应用前景Application prospect of GaN/SiC power devices in aerospace power supply万成安北京卫星制造厂有限公司领域总师WAN Chengan Field Chief Engineer of Beijing Satellite Manufacturing Factory Co., Ltd

SiC功率器件在光伏逆变器中的应用进展Application progress of SiC power devices in photovoltaic inverters刘保颂锦浪科技技术研究中心总监LIU Baosong Technical director of Ginlong Technologies co.,ltd

SiC功率器件制造工艺特点与核心装备创新进展Manufacturing process characteristics and key equipment development of SiC power devices巩小亮中国电子科技集团公司第四十八研究所 半导体装备研究部副主任GONGXiaoliang Deputy director of Semiconductor equipment research department, the 48th Research Institute of China Electronics Technology Group Corporation