SiC功率器件制造装备技术及发展趋势Technology and development trends of SiC power devices manufacturing equipment巩小亮中国电子科技集团公司第四十八研究所、半导体装备研究部主任Xiaoliang GONGDirector of Semiconductor equipment research department, The 48th Research Institute of China Electronics Technology Group Corporation

SiC功率器件制造工艺特点与核心装备创新进展Manufacturing process characteristics and key equipment development of SiC power devices巩小亮中国电子科技集团公司第四十八研究所 半导体装备研究部副主任GONGXiaoliang Deputy director of Semiconductor equipment research department, the 48th Research Institute of China Electronics Technology Group Corporation